一种微机械陀螺仪仿真分析

Simulation of a micro mechanical gyroscope

根据微机械陀螺仪的灵敏度公式要使它具有高灵敏度,它的驱动模态固有频率和检测模态的固有频率应尽量接近。本研究通过CoventorWare软件中的系统模块进行建模、仿真、分析,改变陀螺仪的结构参数,使它的固有频率接近,达到优化设计目的。

The natural frequencies of the driving mode and sensing mode should be as close as possible in order to improve sensitivity according to the sensitivity's formula of micro gyroscope.System model of CoventorWare software is used to analyze the natural frequency and the structure parameters of the micro gyroscope.The design is optimized.