微机电系统用压电驱动器的发展及应用

Development and applications of piezoelectric actuator in MEMS

微驱动器是微机电系统运行的关键,压电驱动器作为新的驱动元件在这一领域迅速发展起来。它具有很高的位移分辨率以及抗干扰能力,并且控制方法简单。本文介绍了微机电系统、压电驱动器的概念,并对国外微机电系统中压电驱动器的发展及应用情况进行了详细、全面的介绍,同时指出了压电驱动器研究领域需深入探讨的关键技术。

Micro-actuator is key to the operation of micro electro mechanical system.Piezoelectric actuator develops quickly as the new type actuator in recent years,which provided with high resolution of displacement and capability of anti-jamming,and easy to control.The concept of piezoelectric actuator and MEMS as well as the current state of piezoelectric actuator in MEMS are introduced in this paper.At the same time,the key technology required to be studied is analyzed in the piezoelectric actuator's study.