基于双频激光干涉的坐标测量机测量不确定度检定系统

Calibrating system of uncertainty for CMM based on twin-frequency laser

分析了现有坐标测量机精度检定的方法,设计了基于双频激光干涉仪为测量基准的三坐标测量机测量不确定度检定系统,给出了检定过程中测量数据的处理方法和测量不确定度的表达式。该系统利用高精度的直线静导轨和动导轨的组合可快速方便地实现三坐标测量机单轴和测量空间内测量不确定度的检定。

A calibrating system of uncertainty for CMM based on twin-frequency laser is presented.The measurement data processing method and uncertainty expression are put forward.The system can calibrate rapidly the single-axis and 3-D special measuring uncertainty.