基于Ppy敏感膜的pH-ISFET研制

Development of pH-ISFETs with Ppy sensitive membrane

研制了一种采用0．35μm标准CMOS工艺制造的,集成ISFET／REFET及其信号处理电路于一体的集成化芯片系统(SOC)。其中ISFET敏感膜为采用电化学法制备的导电聚合物Ppy(Polypyrrole,聚吡咯),通过对各种条件的优化,最终得到了pH响应为56mV／pH的高灵敏度。

Designed a system-on-chip (SOC) integrated with ISFET/REFET, quasi reference electrode, and their relative signals process circuits. The chip was realized with chartered semiconductor's 0. 35μm, 4-metal and 2-poly layer standard CMOS process, and the ISFET sensitive membrane material is Polypyrrole obtained by electrochemical polymerization processing. After optimizing the polymerization parameters, a high sensitivity of 56mV/pH was achieved.