一种闭环控制圆光栅角度分度测量装置

Circular grating angle-division measuring equipment based on closed loop controlling system

研制闭环控制的用于角度标定与测量的分度装置,该装置以永磁直流力矩电机驱动精密轴系主轴的运转带动角度分度盘的转动,以圆光栅测量系统检测主轴的转动角度。由电流环、速度环和位置环组成的闭环控制系统实现零误差分度定位控制。研究圆光栅测量信号处理中信号细分形成的系统非线性误差对分度精度的影响,建立误差修正模型。经检定,系统在±5°的角度范围内分度精度达到±0．2″,定位重复性0．06″。

An angle-division equipment controlled by a closed loopsystem has been developed, in which a permanent magnet DC moment electromotor drives the precision principal shaft, and the angle is detected by a circular grating measuring system. The closed loop controlling system, which is composed of an analog electric current loop, an analog speed loop and a digital position loop, has realized zero-error angle-division positioning control. Nonlinear error caused by signal differentiation during the circular grating measurement is analyzed, and an error correction model is proposed. It is appraised that the angle control repetition of the equipment is 0. 06' and the precisionis±0. 2' within the range of±5°.