高精度单颗粒发生器

High exact single—particle generator

提出了一种新颖、高精度和高性价比单颗粒发生器的新方法,实验显示该方法可以得到定位精度1mm,最小2μm的标准颗粒,并且可以随意控制标准颗粒的大小尺寸。

A new method makes a single—particle generator, which has high precision is proposed in this paper. Experiment results show that the generator can generate micrometer—size particle with different diameter. The minimum diameter is two micrometers.