基于虚拟仪器的SPM通用平台的设计与研究

Design and study of commonly used platform of SPM based on the virtual instruments

本论文采用虚拟仪器技术开发SPM通用平台,为SPM的设计提供了一种新方法,使SPM成为通用、开放、兼容的仪器体系。此平台能迅速扩展仪器的功能和种类。其硬件采用PXI平台,软件采用LabVIEW平台,包括LabVIEW FPGA模块、LabVIEW实时模块和PID模块等。系统具有开发周期短,开发成本低,维护方便,易于应用新理论、新算法和新技术等优点。

The virtual instruments technology is used for developing commonly used platform of SPM in this paper, and a new idea for designing SPM instruments is proposed. It makes SPM instruments more common, open, and compatible. The functions and categories of instrument are expanded. The hardware is designed by PXI platform. The software is designed by LabVIEW platform, which including LabVIEW FPGA module, LabVIEW real-time module and PID module etc. The system has a lot of merits, such as short development period, low cost of development, convenient maintenance. It is also easy to apply new theory, new algorithm and new technology.