纳米粉体制程在线粒径测量系统的研发

Development of an On-line Nanoparticle Size Measurement System for Process Monitoring of Nanoparticle Synthesis

发展了一套在线光纤式动态光散射粉体粒径测量系统,作为纳米颗粒制程粒径参数测量与分析.工业上对纳米粉体性质均一性(Uniformity)要求较高,为了获得在线制备纳米粉体颗粒的精确粒径大小与分布,本研究由激光动态光散射(Dynamic Light Scattering,DLS)原理,利用光纤探头方式,研制了一套在线粉体取样与粒径测量系统,针对目前台北科大自行研发的真空潜伏纳米流体制程(SANSS)进行了系统整合与测试.本研究针对100nm标准粒径大小的聚苯乙烯(Polystyrene)粉体进行系统测量能力评估,确定了研发系统测量准确度(Accuracy)与重现性(Repeatability).实验结果显示,研发系统测量的平均粒径最大误差值在8%以下,初步确定测量系统可有效地监控纳米流体制程,提供纳米粉体制程的重要在线信息.

This article presents the development of a fiber-type nanoparticle measurement system for particle sizing and distribution evaluation.The desired uniformity of nanomaterials has been widely recognized as an extremely important step towards successful development of nanomaterials for technology breakthrough.To achieve accurate particle sizing and characterization,this research investigates the feasibility of using the dynamic light scattering(DLS) technique and optical fibers to measure and monitor particle sizes during a particle fabrication process developed at Taipei University of Technology.The basic principle of the DLS is to measure distortions in laser light caused by the Brownian movement of particles and to calculate the mobility of particles in de-ionized liquid in which the diameter of the particles can be further deduced.Based on the DLS,an automatic nanoparticle sampling and measurement system was successfully developed and integrated with the fabrication process as an important step to test and verify the feasibility and performance of the proposed method.Details of system design and experimental results are included to evaluate the outcomes of this approach.To examine the measurement accuracy of the developed system,the standard polystyrene latex particles with known accurate sizes were applied to verify the feasibility of the proposed methodology.The experimental results indicate that the on-line measurement errors can be kept within 8% of the overall measuring range.The developed system can be effectively utilized to measure and monitor TiO2 nanoparticles.