基于光纤技术转子表面高精度测量系统的研究

Research on the System for High Precision-measurement on Rotor's Surface

借助光的波动性,提出一种新转子球表面测量技术,用光强调制式的双光纤传感器作为测量元件,从理论和实验两方面,分析了光纤位移传感器特性,分别给出了传感器实验结果和理论结果。利用该光纤位移传感器进行转子表面微小变化的测量,设计一种适用于转子表面测量的系统其测量精度达到0.005μm,给出转子表面图形绘制法—墨克脱投影法,并给出了本转子的测量表面图。此系统也可以用在其它物理学的尖端表面测量实验中。

The technology of measure for the surface of rotor is researched on the basis of light interference. The dual optic-fiber sensor via modulating intensity of light is used as measuring component. The characteristics of optical fiber displacement sensor are analyzed separately in theory and through experiment. The experimental results compared with theoretical results are given. A new measuring method of surface is designed by using this optical fiber micro-displacement sensor. A system for measuring surface of rotor is designed and its precision is 0.005μm. The useful method of protracting the surface of rotor which is Mercator chart is studied. The protracting chart of rotor's surface is described. The system can be used in the experiment of measuring on surface in other project physics.