纳米钛酸锶钡湿敏元件性能研究

Investigation of Nanometer BaSrTiO_3 Humidity Sensor

用纳米钛酸锶钡(Ba1-xSrxTiO3)制成电阻式湿敏元件。测量了不同锶含量元件的感湿特性及介电特性。结果表明,锶含量对元件灵敏度、湿滞、响应恢复时间等特性影响较小,而对元件的感湿范围以及电容、频率、复阻抗、介电损耗等特性有不同程度的影响。分析了元件的感湿机理。

Resistive type humidity sensors were made of nanometer BaSrTiO_3. The properties of humidity sensitivities and dielectrics of the sensors were measured. The effect of Sr content on sensitivity, hysteresis, and response and recover times of the sensors was not significant. But some properties were influenced by Sr content, such as the sensing range, capacitance, frequency and dielectric loss. The humidity sensing mechanism of the sensor was analyzed.