纳米接触问题的连续方法建模与计算

Nanocontact Continuum Model and Calculation of MEMS

针对微电子机械系统中的“微碰撞”、“微接触”、“纳米摩擦”等现象,根据Hamaker3个假设和经典弹性理论,采用连续介质力学方法,建立了球-球、球-面接触的弹性物理模型;给出了粘着力引起的球-球、球-面间接触半径的计算方法;指出在分析计算与微观接触有关的问题时必须考虑粘着力。从而为纳米接触、纳米摩擦的进一步研究提供理论基础。

Based on the classical theory of elasticity and three Hamaker hypotheses, a elastic contact model of sphere-sphere and sphere-plane adopting continuum method is presented to solve the problems of 'micro collision', 'micro-contact' and 'nano-friction', etc. in microelectromechanical systems. The technique of determination adhesion-caused contact radiuses of sphere-sphere and sphere-palne is proposed. The importance of adhesion is pointed out in the analyses and computations of microcontact-related problems.