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Cu/,Ni/4H-SiC Schottky势垒的退火研究

Anealing Effect on Cu/, Ni/4H-SiC Schottky Barrier
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摘要 采用磁控溅射方法分别在n型4H-SiC上沉积Cu,Ni金属薄膜形成Schottky接触,并进行不同温度下的退火,通过I-V和C-V测试,研究不同退火温度对Schottky势垒高度以及理想因子的影响.研究结果表明,对Cu,Ni金属,适当的退火温度能提高其与4H-SiC所形成的Schottky势垒高度,改善理想因子,但若退火温度过高,则会导致接触的整流特性退化.器件在退火前后,反向漏电流都较小.热电子发射是其主要的输运机理.所制备的金属半导体接触界面比较理想,无强烈费米能级钉扎.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2005年第z1期277-280,共4页 半导体学报(英文版)
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