MEMS设计系统中部件库的定义、描述与原型系统的实现

Part-Library in MEMS Design System: Definition,Description and Prototype Implementation

针对MEMS设计中设计重用、机械性能评测等问题,提出了包括工艺模型、三维形状以及动态规律等重要信息的部件库系统。文中首先描述了MEMS设计系统中部件及部件库的定义和内容,并根据MEMS器件设计的特点,设计了易于重用管理的部件之间的层次结构关系;接着用面向对象的方法描述了部件库内容,并举出了从部件库出发自底向上设计虚拟微泵的形式化描述的例子,验证了部件库设计的可行性;最后,建立了具备查询、插入和更新等操作功能的面向对象的存储库,该存储库能够和MEMS设计系统[1]的其它模块建立连接关系。

According to the problem of reusing the resources and evaluating machenical funtions in MEMS deign, a part-library based system is put forward. Firstly the definitions and contents of part and part-library are described, a reusable administrative levels structure is designed for MEMS devices. Secondly the object orient formal description is introduced, following by the example of virtual pump s bottom-up design. Finally the object orient part-library is built, capable of operation functions such as query, i...