激光表面形貌纳米测量的研究

Study of laser nanometer measurement for a subject surface shape

测量设备由光路单元、数字鉴相单元、A/D变换单元、测量平台、PC机及相应的软件组成.利用激光的Raman-Nath衍射和光干涉的原理,该设备通过光探针得到测量和参考正弦波的相位差;PC机计算与该相位差成线性关系的工件表面的起伏变化量,通过测量平台完成表面形貌的钠米测量.该设备的实际测量精度为3nm.

The measurement equipment consists of an optical path unit, a digital phase detect unit, an A/D conversion unit, a measurement platform, a computer and a corresponding software. In light of theories of the Raman-Nath diffraction and interferometer of laser, the equipment gets phase differences between measurement and reference sine signals by a light stylet. And the computer figures out wave heights of an object surface which are proportional to the phase differences, and then finishes nanometer measurement...