一种SOL-GEL制备钛酸锶钡(BST)薄膜新路线的工艺研究

Study on the Process of a Novel Sol-gel Route to Prepare Barium Strontium Titanate (BST) Thin Films

研究利用钡、锶的碳酸盐代替醋酸盐,采用sol-gel技术制备Ba1-xSrxTi O3(BST)铁电薄膜的工艺过程.以碳酸钡、碳酸锶和钛酸四丁酯作原料,采用sol-gel工艺制备BST薄膜,对比研究了用两种混合溶剂制胶和制膜的工艺.通过XRD分析了薄膜的结构,用AFM测定表面形貌,结果表明,采用碳酸盐作为钡、锶的原料,用冰醋酸和乙二醇甲醚混合液作溶剂,可配制出澄清透明、能长时间放置的溶胶,并制备出膜厚均匀、表面光洁致密、没有裂纹的全钙钛矿相的BST薄膜.

The process of fabrication of Ba_ 1-x Sr_xTiO_3 (abbr. as BST) thin films by a novel sol-gel route was studied by using the carbonates of Ba & Sr for the substitution of acetates. BST thin films in present studies were prepared by sol-gel technique using barium carbonate,strontium carbonate and titanium-tetrabutoxide as raw materials. The processes of preparing the sols and thin films by using two different mixture solvents were compared. The physical structures of the BST thin films were measured by XRD, t...