溶胶-凝胶法制备掺铋(Ba_(0.65)Sr_(0.35))TiO_3薄膜的结晶特性研究

Crystalline Properties of Bi-Doped (Ba_(0.65)Sr_(0.35))TiO_3 Thin Films Prepared by Sol-Gel Method

采用改进的溶胶-凝胶(sol-gel)工艺制备了掺Bi(Ba0.65Sr0.35)Ti O3(简称BSTBi)薄膜.XRD研究结果表明,BST系列薄膜具有单一钙钛矿结构;AFM测试结果表明BST薄膜表面平整致密,无裂纹.表面均方根粗糙度约为3～6.5nm,晶粒大小分布均匀,直径约为50～75nm.随着热处理温度的提高,BST薄膜的晶粒变大,表面粗糙度变大.

(Ba_ 0.65 ,Sr_ 0.35 )TiO_3(BST) and Mg doped BST thin films were prepared by an improved sol-gel method. XRD analyses showed that all the BST films had formed pure cubic perovskite structure; AFM graphs showed that BST films were smooth, dense and crack-free. The Root Mean Square(RMS) of these films were about 3～6.5nm and the average grain sizes were about 50～75nm. The RMS and grain size of BST films become larger with higher annealing temperature.