期刊文献+

一种新型微机电系统共面波导传输线设计与数值分析

Design and Simulation of a Novel Coplanar Waveguide for Micro-Electromechanical Systems
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摘要 提出了一种基于微机电系统(MEMS)技术的新颖桥式共面波导(BCPW)结构,采用准静态分析方法对其特征阻抗、导体损耗、介质损耗等基本参数进行了理论计算,并与传统共面波导进行了比较分析.结果表明,新设计具有无辐射损耗、宽阻、低损耗、对加工工艺要求低等优点. A new design of bridge coplanar waveguide(BCPW) with the advantages of zero radiation loss, wide impedance ranges and low attenuation was presented. The characteristic impedance, dielectric loss, conductor loss and sensitivity coefficient of this waveguide were simulated and compared with the conventional coplanar waveguide.
出处 《上海交通大学学报》 EI CAS CSCD 北大核心 2004年第z1期125-128,132,共5页 Journal of Shanghai Jiaotong University
基金 信息产业部电子科学研究院预研项目(0241308050116) 国家自然科学基金资助项目(10377009) 微纳米加工技术国家重点实验室基金项目(51485020301)
关键词 桥式共面波导 微机电系统 特征阻抗 导体损耗 介质损耗 bridge coplanar waveguide (BCPW) micro-electromechanical systems characteristic impedance conductor loss dielectric loss
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参考文献5

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