采用CTD控制电路的二维CMOS风速计研究

2D CMOS Thermal Flow Sensor with CTD Controlling Circuit Design

介绍了一种二维硅热流量传感器,通过恒温差(CTD)控制模式,能同时测量风速和风向。使用四个串连的热堆测量芯片中心区域的平均温度,这种测温的方法非常简单新颖。在简单介绍CMOS硅热流量传感器的工作原理之后,主要介绍CTD驱动电路。经过风洞测试,该传感器能够测量风速0～23m/s,具有良好的线性度,并且360°方向敏感。

A 2-dimentional silicon thermal flow sensor is introduced. It can measure both the velocity and the direction of the gas flow. The sensor works in a constant temperature difference (CTD) mode. Four thermopiles serially connected measure the average temperature of the sensor surface. The method is rather simple and new. After a brief introduction of the working principle, the CTD driving circuit is given. Some experiments were done in the wind tunnel. The sensor can measure the velocity of gas in the range of 0～23m/s with a good linearity, and it has a 360° directional sensitivity.