一体化结构六维加速度传感器设计

Design of a Monolithic Six-axis Accelerometer Based on Single Inertial Mass

提出了一种基于单惯性质量块的一体化结构六维多维加速度传感器设计,介绍了传感器的工作原理,采用有限元工具对传感器静态和动态特性进行了分析,给出了弹性体的应变分布、固有频率及振型等,实验结果表明传感器的误差小于1%。

A novel monolithic six-axis accelerometer is present.It uses strain gauge as sensing element for the detection of acceleration.Six full Wheaston bridges will output differential voltages due to the mass inertial force/torque.The static and dynamic characteristics of the sensor are analysized by FEM.The experiment results are presented also,its errors are less than 1%.