全自动纳米多孔材料薄膜折射率和厚度测定系统

Automatic System of Measuring Refractive Index and Thickness of Nano-meter Material Thin Films

由光学原理推出薄膜折射率和厚度的计算公式,利用步进电机的全自动定位来改变p光和s光下的入射角,测到纳米材料薄膜的反射率,样机测量结果显示薄膜折射率的误差<0.1,薄膜厚度的误差<3%。

Expressions are derived for the measurement the reflectance of nano-meter material thin films. With the reflectance change with incident angle of the parallel polarization and perpendicularity light were measured, the refractive index and thickness of the material could be obtained. With the drive by a step motor and reflectance data acquirement, the measurement system can work automatically. The results show that the thickness accuracy of the measurement was prior to 3%, and the error of refractive index is better than 0.1.