基于MEMS技术的气动式红外探测器的计算机模拟

Simulation of Pneumatic Infrared Sensor Based on MEMS Technology

提出了一种可工作于室温环境下、基于MEMS技术的气动式红外探测器,它由束缚于微型腔体内、对特定波段的红外辐射具有吸收作用的气体介质构成。通过气体介质热膨胀引起的弹性薄膜形变,可获得包含红外辐射源信息的信号。建立了符合器件工作机制的物理模型,并通过有限元模型和流体-热-结构耦合模拟获得了微型腔体内气体介质的温度、速度场分布以及弹性薄膜的形变。

It addresses a novel micro-machined pneumatic infrared sensor, which is classified as an uncooled infrared sensor. The sensor consisted of a small cavity filled with a special gas, which shows a characteristic spectral sensitivity in the wavelength range of the infrared light. Infrared intensity is measured via the deflection of the membrane induced by thermal expansion of the special gas. The finite element method and fluid-thermo-structural coupling is utilized for analyzing the temperature distribution and velocity of special gas, and the mechanical performance of membrane.