硅基PZT薄膜微型悬臂的特性及其在微型传感器执行器上的应用

Characterizations of Si-based PZT film Microcantilever and Its Applications in Microsensors and Microactuators

在硅材料表面沉积PZT薄膜并通过MEMS工艺可以形成硅基PZT薄膜悬臂结构,在外加电场的作用下,悬臂将发生弯曲并输出位移和力,形成微型执行器;在外加集中力和载荷的情况下,可以产生表面感应电荷,借此测量外界力和压力的大小,形成传感单元。这里从PZT薄膜的制备、微型悬臂结构的制备、特性以及目前在微型传感器、微型执行器的主要应用方面作了综述性说明。

PZT thin film was deposited on Si wafer and structured by MEMS method.A Si-based PZT film microcantiever was fabricated.By applying a voltage between the top and bottom electrodes,the microcantilever will bend and the outputs will be displacement and force,which acts as a microactuator.By measuring the charge on the surface of the cantilever,the microforce or the micropressure applied on the cantilever can be calculated,which acts as a microsensor.A summary of preparation of PZT film,structuring,characterizations and applications of piezoelectric microcantilever was presented.