摘要
采用溶胶-凝胶法在硅基板上先分别制备钇稳定氧化锆(YSZ)和钛酸锶(STO)两种薄膜缓冲层。再以钇、钡和铜的醋酸盐为起始原料,选用三种络合剂,配制出了均匀、稳定的 YBCO溶胶;采用提拉法,分别在不同过渡层上制备了 YBCO 薄膜。进一步对 YBCO 纳米薄膜的热处理工艺、薄膜形貌和微观组织结构进行了初步研究。
The yttrium-stabilized zirconia(YSZ)and strontium titanium(STO)film buffer layers were prepared by Sol-gel process on Si substrates.The inorganic acetate of Y,Ba and Cu were used as precursors,and diethylenetriamine,lactic acid and α- methacrylic acid as complexing agents,respectively.The stable YBCO sol can be obtained.The YBCO thin films were prepared by dipping method on buffer layers.The heat treatment condition and crystal structure of the YBCO nanometer films were discussed.
