摘要
用滤质阴极真空电弧(FCVA)离子镀技术在高速钢(W6M05Cr4V2)和不锈钢(0Cr18Ni9Ti)基体上沉积120～150nm非晶金刚石膜。用划痕法测定其结合力,平均临界载荷分别为19.15N(高速钢)和6.44N(不锈钢,CB工艺)。用栓盘摩擦试验测定镀膜的摩擦系数μ和耐磨寿命。摩擦系数μ为0.092～0.105,镀膜耐磨性比高速钢高106～319倍,比不锈钢高480～3600倍,而且镀膜质量稳定,重复性好。
120～150nm amorphous diamond film was deposited on the substrates of high-speed steel (W6Mo5Cr4V2) and stainless steel (0Cr18Ni9Ti) by filtered cathode vacuum arc (FCVA) ion beam depositing. The adhesion was measured by scratch test, the average critical load L_c is 19. 5N (high-speed steel) and 6. 44N (stainless steel CB technics) respectively. The friction and wear performance of the coating were assessed by a pin-on-disc tester. The friction coefficient μ is 0. 092～0. 105. The wearability of coating is 10...
关键词
非晶金刚石膜
膜/基结合力
摩擦系数
耐磨性
amorphous diamond film
adhesion of film/substrate
friction coefficient
wearability
