摘要
本文介绍了微加速度传感器的最新发展,单向微硅加速度传感器,三维集成微加速度传感器系统,微型集成惯性测量平台系统等。还介绍了最新的微加速度传感器和集成微加速度传感器的制造工艺技术。
In this paper, gives new development of micro-accelerators: micro silicon accelerator, 3-D integrated micro-accelerators and micro inertial measuring platform system. In this paper, gives also the new methods in manufacturing micro silicon accelerators and integrated micro-accelerator systems.
