后硅器时代——纳米科学技术进展

Later Silicon Ages

纳米科学技术在20世纪最后10年诞生并得到迅速发展,讨论和论述了新兴的纳米科学技术的进展,展望了包括纳米物理学、纳米电子学、量子功能器件、薄膜传感器、纳米材料、微机电系统、生物技术和原子工程等的应用前景,同时给出了本实验室的某些实验结果。

In the last decade of the 20th century,a brand-new field of nano scale science and technology has emerged in the world.The fundamental and applications of nano scale science and echnology are introduced.The applications of nanotechnology which include nanophysics,nanoelectronics,quantum function devices,film sensors,nanometer scale materials,microelectromechanical systems(MEMS),nanobiological technology and atomic engineering,etc.are prospected.Some experimental results are given.