应用脉冲加热/探测扫描技术进行表面下微尺度热结构探测过程的仿真

A THEORETICAL CONSIDERATION ON SUB-SURFACE MICROSCALE IMAGING BY SThM

提出脉冲加热/探测扫描技术进行微尺度表面下热结构测量原理。通过对于复合材质试样表面受到脉冲热流作用时的瞬态热传导问题进行数值解析,得到各被扫描点的温度响应,根据对温度响应的数据处理结果给出热对比度的定义方式,进行扫描过程的仿真。根据仿真结果讨论分布状态,复合物深度,复合物与母材的物性比对于测量结果的影响。

A pulse heating-probing SThM technique is suggested for microscale sub-surface imaging. To show this technique, a 1-D scanning process is simulated. A micro-composite specimen consisting of a matrix of material l inside which is buried a line of material 2 (with rectangular cross section) is considered. The simulations have been performed for various structures of specimens to discuss the effects of the buried depths of the line and the thermal conductivity ratio of the two materials on thermal contrast.