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在Bridgman炉中涡电流检测晶面位置和形状的可行性分析

ANALYSE THE FEASIBILITY OF EDDY CURRENT DETECT CRYSTAL INTERFACIAL POSITION AND SHAPE IN BRIDGMAN FURNACE
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摘要 Bridgman生长方法已经广泛的应用于融化时大的单晶体生长计算。在生长过程中液体固体分界面位置和形状对生长控制十分重要但难检测。利用许多半导体材料固体和液体状态的电导率的区别,用涡电流检测对生产控制。本文也对选择相应的固态材料对GaAs生长进行冷态实验进行了可行性分析。 The Bridgman method has become a widely used technology for the growth of bulk singlecrystals from the melt Liquid-solid. Interface position and shape 鈘e very important for growth cortrol but difficult to detect in the grovvth process. Using the large electrical conductivity differences between the solid and liquid phases of many semiconducting systems, eddy current detect is used to control production. This page also choose solid material instead of GaAs and analyse the feasibility of cool experiment.
出处 《工程热物理学报》 EI CAS CSCD 北大核心 2004年第S1期158-160,共3页 Journal of Engineering Thermophysics
基金 国家自然科学基金资助(No.50276036)
关键词 涡电流 位置 形状 eddy current position shape
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参考文献2

  • 1J N Carter,A Lam,D M Schleich.Ultrasonic Time-of-Flight Monitoring of the Position of the Liquid/Solid Interface During the Bridgman Growth of Germanium[].The Review of Scientific Instruments.1992
  • 2S Brandon,J J Derby.Heat Transfer in Vertical Bridg-man Growth of Oxides: Effects of Conduction, Convec-tion and Internai Radiation[].Journal of Crystal Growth.1992

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