摘要
丝网印刷制P N结和常用的源扩散制P N结相比具有制结均匀,可减少刻蚀时间,氮气用量可大大减少等优点。通过对扩散的动力学研究,了解了印刷制结的最佳扩散时间和氮气的适宜流速。在最佳扩散时间和适宜的氮气流速的条件下,所制电池片的转换效率可达14.5左右。
Comparing the way of making p-n junction using POCl_3 with the way of making p-n junction using screen-printing can save much more N_2. The dynamics of diffusing was studied including the suitable diffusing time and current velocity of N_2. By this way we can make the solar cell with 14.5% of inversion efficiency.
出处
《中国稀土学报》
CAS
CSCD
北大核心
2003年第z1期166-167,共2页
Journal of the Chinese Society of Rare Earths
关键词
丝网印刷
P-N结
动力学
screen-printing
p-n junction
dynamics