1[1]J R Conrad, et al. J Appl Phys, 1987, 62: 4591-4596.
2[2]X B Tian, et al. Nucl Instrum Method, 2002, B187: 485-491.
3[3]X B Tian, et al. Proceedings IEEE International Conference on Plasma Science (ICOPS 2002) [C] . Banff, Canada, 2002, 5:26-30, 2002.
4[4]X B Tian, et al. Proceedings 13th International Conference on Ion Beam Modification of Materials (IBMM 2002) [C] . Kobe,Japan, 2002, 9 (1-6): 2-007, 57.
