非扫描并行三维共焦检测技术综述

A survey of the non-scanning 3-D profile confocal detecting

共焦测量方法由于其高精度、高分辨率及易于实现三维成像数字化的独特优势而被广泛应用。近年来 ,非扫描三维并行共焦技术引起各国专家的普遍关注 ,该技术将单点扫描变为多路并行探测 ,同步对被测表面的不同点进行检测 ,从而无需扫描实现全场同步测量。该文论述了近年来国内外在共焦并行全场检测技术方面的研究进展 ,介绍了国内外几种并行共焦检测系统的情况 。

the confocal measurement has been applied in 3 D profile detecting fields because of its special advantages of high resolution,high accuracy, and because it is easy to realize the digitization of 3 D imaging, a non scanning whole field confocal detecting method attracted worldwide attentions. The method realizes the division of light beam by use of micro optic component. Multiple beam light parallel detecting is used instead of the single point collimate and scan. This paper reviews the research progress of non scanning 3 D profile confocal detecting, several parallel confocal detecting system is also introduced.