MEMS动态测试系统中频闪驱动电路的实现

Realization of Stroboscopic Driving Circuit in MEMS Dynamic Testing System

在 MEMS动态测试过程中 ,由于 MEMS器件的运动频率都比较高 ,如何获得高速运动的 MEMS器件的清晰图像 ,是MEMS动态特征提取与分析的前提。本文基于机器微视觉的 MEMS动态测试系统 ,设计了一套频闪驱动电路 ,用于采集高速运动的 MEMS器件的清晰图像。从而为后续 MEMS器件动态特征的提取和分析做充分的准备。

According to high speed of MEMS device how to acquire the clear images of it is the precondition in the cause of MEMS dynamic testing. Based on MEMS dynamic testing system this paper designs a set of stroboscopic driving circuits to acquire clear image of high speed MEMS device. It gives full preparation to extract and analysis dynamic characteristics of MEMS devices.