DMD弹性片同基底之间粘着力计算

Adhesion Research of Digital Micro-mirror Nano-Contact

随着材料尺寸、加工尺寸的日趋减小 ,粘着力对微电子机械性能影响越来越大。本文建立了 DMD弹性片同基底之间纳米接触的物理模型 ;根据 Hamaker理论和赫兹理论 ,用连续方法推导出粘着力的力学模型 ;仿真出粘着力及变形面同接触间距的关系 ;仿真结果同相关实验一致 ;从而为 DMD设计 ,加工及纳米碰撞。

In order to solve the adhesion effect on the micro elecrmechanics capability, the nano contact model of digital micro mirror between the elastic flake and basis is found on the base of the Hamaker three hypothesizes and Lennard Jones potential. The mechanic equation is obtained with continuance method, followed by the simulation of the relation between the adhesion and contact interval. The result is agreed with the relative experimentation.