钨青铜系列压电陶瓷驱动器迟滞特性的改善

Improving the Hysteresis Characteristic of Tungsten Bronze Ceramic Piezoelectric Actuators

为提高微动工作台开环控制的定位精度 ,选用了性能稳定的新型钨青铜型多层片式压电陶瓷驱动器作为驱动元件。同时根据压电晶体的电畴结构和晶体结构原理 ,研制出抗迟滞驱动控制软件。实验证明 ,采用了这种新的驱动方式可以使驱动器的迟滞误差下降 70 %～ 90 %。

New stable characteristic tungsten bronze monolithic multi layer piezoelectric actuators are adopted as driving component in order to increase the positioning accuracy of the open loop controlling micro table, based on the principle of the electric domain and crystal lattices structure of piezoelectric actuators, anti hysteresis control software is developed. The experiment results show the hysteresis error of actuators decreases 70%～90% after adopting this new driving mode.