洁净平板光学玻璃表面颗粒的测量

Particle Sizing on the Clean Flat Optical Component

介绍了一种光学颗粒计数器设计技术的理论和方法,并研制了一套用于颗粒计数的实验装置。经过实验验证,该装置能够对洁具平板光学玻璃上颗粒状杂质的数量和粒径进行检测。试验表明.该装置不仅能够测量大颗粒,而且还能够检测较小的颗粒。

The particle count technology based on light scattering at different collecting angles is introduced and device is constructed. The experiments verify that this device can detect large particles as well as small particles on the surface of the clean optical component.