摘要
讨论了一种新型的基于空穴注入效应的电导型CuPc薄膜二氧化氮气体传感器,其器件结构为:采用溅射工艺的ITO(InO、ZnO)作下电极,真空蒸发CuPc薄膜作为敏感功能层,上电极为AL叉指电极。这种CuPc传感器与传统的AlO_3/CuPc/Al相比,电阻下降了3～4个数量级。同时讨论了该传感器的敏感特性。
One novel kind of CuPc film nitrogen dioxide (NO_2) gas sensor based on hole injection was discussed.
The sensor structure is Al_2O_3/ITO/CuPc/Al: ITO (indium-tin-oxide) film prepared by DC magnetron reactive
sputtering was used as underside electrode, CuPc film prepared by vacuum evaporation was used as sensitive
functional layer. Compared to traditional CuPc film NO_2 gas sensor (Al_2O_3/Al/CuPc) this kind sensor has better
sensitivity, better humidity resistivity, and its resistance decreases 3～4 order of magnitude.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2003年第z2期177-178,共2页
Chinese Journal of Scientific Instrument
关键词
酞菁铜
氧化铟锡
空穴注入
敏感特性
Copper phthalocyanine (CuPc)
Indium-tin-oxide (ITO)
Hole injection
Sensitive properties
