摘要
为了解决传感器的数字化,提出了一种新的环振式数字压力传感器,它采用做在硅梁上的MOS环形振荡器作为敏感元件,采用混频器作为片内的信号处理单元,实现环形振荡器的频率相减。该传感器的输出量为频率信号,具有准数字输出、灵敏度高、温度系数低以及制作工艺简单等特点。样品的灵敏度为1.52kHz/kPa。
A novel digital pressure sensor using Ring Oscillators (RO) and mixer is presented. The sensitive unit
of this pressure sensor is MOS ring oscillators located on silicon films. There are two different ring oscillators in
this accelerometer with the same electrical parameters. The output signal was achieved by subtracting the syn-
tonic frequency of one ring oscillator from that of another. The subtraction was realized by a mixer located on the
bulk silicon. The sensitivity of fabricated device is 1.52 kHz/kPa.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2003年第z2期210-211,共2页
Chinese Journal of Scientific Instrument
