摘要
A micromechanical optical switch driven by electrostatic was fabricated with (100) silicon and tilted 2.5° (111) silicon. The pull-in voltage is 13.2V, the insertion loss is less than 1.4dB, the crosstalk is less than -50 dB.
A micromechanical optical switch driven by electrostatic was fabricated with (100) silicon and tilted 2.5° (111) silicon. The pull-in voltage is 13.2V, the insertion loss is less than 1.4dB, the crosstalk is less than -50 dB.
作者
Wei Dong, Xindong Zhang, Caixia Liu, Shuang Zhang, Cuiping Jia, Jianxuan Pan, Dongming Sun, Ping Ji, Weiyou Chen (College of Electronic sciences & Engineering, State Key Laboratory on Integrate Optoelectronics, Jilin University, Changchun 130023,r.R.China,Tel:+86-431-8498947, Fax:86-431-8923907, E-mail:jludw@263.net)
出处
《光学学报》
EI
CAS
CSCD
北大核心
2003年第S1期139-140,共2页
Acta Optica Sinica
