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ROGOWSKI线圈在磁脉冲压缩准分子激光器中的应用 被引量:1

Application of the ROGOWSKI coil in the excimer laser using magnetic pulsed compressor(MPC)
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摘要 介绍了磁脉冲压缩器在准分子激光器中的基本工作原理、磁性材料的计算公式和磁脉冲压缩器的参数结构设计,给出了使用了磁脉冲压缩器的准分子激光器的放电过程,并且使用自制的ROGOWSKI线圈测量了不同放电电压时的实际放电过程中的闸流管的脉冲电流波形,还测量了不同放电回路电感Lo时的通过闸流管的脉冲电流波形和激光输出能量。在此次实验中,通过分析所得到的放电波形,磁脉冲压缩器的作用得到了证实,测量结果与原理有着很好的一致性。本实验为放电回路的优化设计提供了有效的依据。 The principle of Magnetic Pulsed Compressor applied in Excimer Laser and ROGOWSKI coil has been introduced,The designing of MPC and characteristics of magnetic material are also analyzed.The pulse current waveforms of thyratron have been measured by ROGOWSKI coil in different discharging voltages.Waveforms of thyratron have been measured when the inductance Lo was different.In the experiment,MPC is proved to be useful by analyzing and comparing the waveforms and the result conforms to the principle.This exp...
出处 《激光杂志》 CAS CSCD 北大核心 2008年第4期16-17,共2页 Laser Journal
关键词 ROGOWSKI线圈 磁脉冲压缩 准分子激光器 ROGOWSKI coil magnetic pulsed compressor(MPC) excimer laser
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  • 1Dirk Basting.Excimer Laser technology[M].Published by Lambda Physik,2001,ISBN3-00-006395-1.
  • 2D.Basting,K.Hohla,E.Albers,H.v.Bergmann.Thyratrons with magnetic switch:The key to reliable Excimer Lasers[J].Laser & Optoelektronik,2000,84(2):128-131.
  • 3Tsutomu Shimada,Minoru Obara,and Akira Noguchi.An all solid-state magnetic switching exciter for pumping excimer lasers[J].Rev.Sci.Instrum.,1985,56(11):50.
  • 4Hiroshi Tanaka and Minoru Obara.An all solid-state magnetic pulse compressor with amorphous metals for pumping a repetition-rated KrF excimer laser [J].Rev.Sci.Instrum.,1990,61(4):1196-1199.
  • 5I.Smilanski S.R.Byron,and T.R.Burkes.Electrical excitation of an Xe Cl laser using magnetic pulse compression[J].Appl.Phys.Lett.,1982,40(7):1.

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