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Investigation of Induced Distortions in a-Si∶H/a-SiN_x∶H Multilayers by Raman Scattering Technique 被引量:8

Investigation of Induced Distortions in a-Si∶H/a-SiN_x∶H Multilayers by Raman Scattering Technique
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摘要 The a Si∶H/SiN x ∶H sample series are investigated by means of Raman scattering technique(RST). The result shows that due to the structural mismatch between a Si∶H and a SiN x ∶H, severe induced distortions are produced in the interface of the heterojunction, and these induced distortions tend towards a certain energy state. The ordering of the interface structure depends on the periodic number of multilayer thin films. The a-Si : H/SiN_x : H sample series are investigated by means ofRaman scattering technique(RST). The result shows that due to thestructural mismatch between a- Si: H and a-SiN_x : H, severe induceddistortions are produced in the interface of the heterojunction, andthese induced distortions tend towards a certain energy state. Theordering of the interface structure depends on the periodic number ofmuhilayer thin films.
出处 《Semiconductor Photonics and Technology》 CAS 2002年第4期221-227,共7页 半导体光子学与技术(英文版)
关键词 Multilayer films Heterojunction Interface region INDUCED DISTORTIONS Multilayer films Heterojunction Interface region
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  • 1王志超,物理学报,1988年,37卷,1291页
  • 2王志超,物理学报,1988年,37卷,189页
  • 3王志超,物理学报,1987年,36卷,17页

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