Effects of Preparation on Luminescent Characterization of Porous Silicon

Effects of Preparation on Luminescent Characterization of Porous Silicon

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摘要 Porous silicon samples are prepared by pulse electrochemical etching and DC electrochemical etching. The effects of different preparation methods on luminescent characterization of porous silicon are investigated. Compared with DC electrochemical etching, pulse electrochemical etching produces the porous silicon characterized by a more even surface, a stronger luminescence and a PL blue shift to a certain degree. Porous silicon samples are prepared by pulse electrochemical-etching and DC electrochemical-etching. The effects of different preparation methods on luminescent characterization of porous silicon are investigated. Compared with DC electrochemical-etching, pulse electrochemical-etching produces the porous silicon characterized by a more even surface, a stronger luminescence and a PL blue shift to a certain degree.

作者 SHI Xiang hua, LIU Xiao bing (Dept. of Phys. and inform. Tech., Changsha Univ. of Electr. Power, Changsha 410077, CHN)

出处《Semiconductor Photonics and Technology》 CAS 2002年第4期238-241,252,共5页 半导体光子学与技术（英文版）

基金 NaturalScienceFoundationofHunanProvinceEducationDepartment China

关键词 Pulse ETCHING BLUE SHIFT PREPARATION Pulse etching Blue shift Preparation

分类号 O433.1 [机械工程—光学工程] O477.1 [理学—半导体物理]

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2002年第4期

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Effects of Preparation on Luminescent Characterization of Porous Silicon

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