多热源工业合成SiC技术

INDUSTRIAL SYNTHESIS OF SiC BY MULTI-HEAT SOURCES TECHNOLOGY

介绍了自行发明的多热源炉合成SiC技术的基本原理。研究了炉内温度场的叠加特点和温度梯度的变化规律。对比了单热源炉、二热源炉和三热源炉的实验室合成效果。工业应用表明:三热源炉比传统单热源炉可节能。10％～15％;一级品率提高30％;单炉产量可提高约50％,特级品SiC含量由传统技术的98％提高到99.5％以上。多热源工业合成SiC新技术具有节能、高质、高产和生产安全等特点,而且极便于炉体的大型化。

Structure character and the radical theory of the technology on SiC synthesis by means of new designed multi-heat source furnace were introduced. The feature of the temperature field addition and the rule of the temperature gradient variation in furnace have been investigated and the synthesis effects by single-, twin- and triple-core furnace in laboratory were comparatively analyzed. The results indicate that triple-core furnace can save 10%-15% of energy, raise 30% of the yield of the first-grade products and raise about 50% of the yield per furnace than traditional single-core furnace. The SiC content of the top-grade product is up to 99.5% while the tradition technology is 98%. Therefore the new industrial synthesis technology by multi-heat source furnace is the technology of saving-energy, high performance, high yield and safety. And also the furnace is very easy to magnify.