摘要
介绍一种利用半导体单晶压阻效应制成的新型集成压力传感器。将其应用于含水率等检测中,使检测精确度得以提高。
A new-type intelligent pressure sensor which utilizes the effect of semiconductor piezoresistance is applied in the speed detection of moisture. As a result, the accuracy of detection is improved.
出处
《中国仪器仪表》
2002年第z1期14-16,共3页
China Instrumentation
