压电陶瓷微位移驱动技术研究

STUDY ON PZT MICRO-DISPLACEMENT DRIVING TECHNOLOGY IN PRECISION MACHINING

精密异形非圆回转曲面的加工是精密加工中很重要的内容,微位移驱动技术是其中的关键技术。目前,微位移驱动元件种类很多,从控制精度和可操作性分析,压电陶瓷驱动有其独特的优点,但它的输出位移小,而且对于一定的驱动电源,输出幅度与输出频率负相关,这在很大程度上制约了它在高频响较大幅度位移输出场合的应用。为此首先对压电陶瓷的静、动态驱动特性进行了分析,并就特定 PZT(Piezoelectric translator)进行了试验,在此基础上说明了该类微位移驱动有效的加工范围和改善其输出特性的措施,并提出了一种在较高频率下输出较大位移的方法,通过对系统进行数学建模进行了分析讨论,指出了其应用前景。

Micro-displacement machining of precision abnormal surface is one of key technologies of processing precision curve surface. Currently, there are lots of driving elements of micro-displacement, in which piezoelectric ceramics driving has unique advantages from the view of control precision and manipulability. But the displacement output of PZT (Piezoelectric translator) is so small and influenced by output frequency that the application is greatly restricted on the occasion of high frequency response as well as larger displacement output. So the static and dynamic driving characteristic of PZT are analyzed and on the base of experiments, effective machining range and method of improving output quality are presented according to the PZT. Meanwhile, one way of outputting larger displacement on condition of higher frequency response is proposed and through math modeling is discussed. Lastly, the application of the driving technology is forecasted.