摘要
采用面阵CCD作为图像传感器,结合微机械器件结构尺寸的测量特点,建立非接触式无损图像测量系统,并给出了典型平面几何尺寸的测量原理和算法。试验结果表明系统具有良好的稳定性和较高的精度。
A non-contacting and harmless image measurement system is presented. According to the measurement characteristic of micromachined device's dimension, the system is setup by plane CCD as image sensor. The measurement principle and algorithm of typical plane geometric dimension is also discussed. The results of experiment show that the system is steady and precision.
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2002年第z1期101-103,107,共4页
Journal of Mechanical Engineering
基金
容闳基金
关键词
微机械器件
形状尺寸
图像测量
Micro-machined devices Geometric dimension Image measurement
