摘要
电火花抛光金刚石膜的工艺是预先在金刚石膜表面镀覆一层导电层,然后采用电火花进行加工,使金刚石膜表面突起的尖峰被迅速去除。在单脉冲放电抛光试验中深入地研究了镀层材料对电火花抛光金刚石膜的影响,并证实了加工中金刚石表面的石墨化是使电火花加工得以不断延续的关键。通过旋转电极的抛光试验,验证了旋转电极连续抛光金刚石膜的有效性,提出电火花抛光的机理模型。
The polishing of a diamond film by EDM is such that the surface of the diamond film is coated with a layer of electrically conductive material in advance, and then EDM method is employed to process it. As a result, the peaks on the surface of the diamond film are removed rapidly. In the discharge experi- ment of single pulse, the effect of the coated material on the removal of CVD diamond film has been investigated in detail. It is evident that the graphitization of the surface of CVD diamond film ensures EDM to be continued. The polishing experiment by EDM with rotary electrode indicates the effect of continuous polishing under the action of rotary electrode, by which a physical model of polishing by EDM is put forward.
出处
《机械工程学报》
EI
CAS
CSCD
北大核心
2002年第z1期168-171,共4页
Journal of Mechanical Engineering
基金
国家自然科学基金(59875014)
广东省自然科学基金(980423)
关键词
金刚石膜
电火花
抛光
CVD diamond films EDM polishing
