铁电薄膜的制备方法

Technology of Preparing Ferroelectric Thin Film

介绍了制备铁电薄膜的几种不同种类的方法。 L SMCD技术是一种新型的制备铁电薄膜的技术。采用超声雾化产生微米级或亚微米级尺寸的气雾 ,再用载气将气雾引入沉积室内 ,沉积在基片上。重复此过程直至膜厚达到所需厚度。

A few different kinds of methods of preparing ferroelectric thin film are introduced LSMCD (Liquid Source Misted Chemical Deposition) is a new type of technology for preparing ferroelectric thin film.A humidifier is used to generate micron sized or submicron sized droplets.Then the droplets are carried into the deposition chamber by air flow and deposited to the substrate.This procedure is repeated several times to produce the desired film thickness.