相移算法模拟实验研究

Computer Simulation of Phase-shift Algorithm

相移干涉技术在表面形貌定量测量中得到广泛应用。其中相移算法是影响相位测量精度的关键之一。分析比较了常用四种算法:四帧算法、五帧算法、四帧免疫算法、五帧免疫算法原理公式及对相位测量的影响。用计算机进行模拟实验,提出样本方差和最大偏差两个参数评价算法的优劣。得出传统四帧算法对相移误差最敏感,尽量少用,优先采用五帧算法的结论,有实用性。

Phase-stepping technique is commonly applied in surface measurement, where phase-shift algorithm is the main source of measurement error. In this paper,the calculation theory and consequence in measurement error of the four major algorithms are discussed. The four algorithms are four-phase algorithm, five-phase algorithm, four-phase immune algorithm and five-phase immune algorithm. Using a computer simulation program, virtual experiment is done. According to the experimental result and compared method in this paper,the five-phase algorithm is the best one, and the four-phase algorithm is sensitive to phase-error,therefore is to be avoided.