垂直腔体表面光发射器件的模拟与实践

Design and Fabrication of Vertical Cavity Surface Light Emitter

设计了一种新型的垂直腔体表面光发射器件,并模拟了布拉格反射镜的反射谱以及薄膜厚度误差对镜反射谱的影响。模拟结果从理论上证实了PECVD方法能够满足制备垂直腔体表面光发射器件所要求的工艺条件,实验中用PECVD工艺制备出了性能良好的器件。

This paper designs a novel Vertical Cavity Surface Light Emitter (VCSLE) and simulates the reflectance of its Bragg reflective mirror as well as the effect of film thickness errors on the reflectance. The result proves PECVD meets the technical requirements of the preparation of VCSLE and a device with excellent performance is fabricated.