消光椭偏仪测量中的四区域法平均

Four-Zone Averages in the Null Ettipsometric Measurement

作者讨论了如何用四区域法平均对椭偏仪测量数据进行处理的问题 ,通过分析认为 ,该法可以消除由起偏器、补偿器、检偏器引起的方位角误差 .并用该法规范椭偏测量角Ψ和Δ ,使Ψ∈(0°,90°)和Δ∈(0°,36 0°) ,实验所得结果与理论计算值符合得很好 .

The method of four-gone averages used to deal with ellipsometric experimentdata is discussed.This method can eliminate the agimuth-angle errors resulting from polariger,compensator,and andlyger.How to normalige the values of Ψ and Δ respectively to(0°,90°)and(0°,360°)by this methed is also investigated.the measurement results coincide with theeretical calculation well.